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更新时间：2025年12月16日 20:19:52
点击次数： 在半导体湿法制程的微观世界里，每一次清洗、每一回蚀刻、每一道光阻剥离，都是决定芯片性能与良率的关键战役。这些工艺的核心，在于将高纯度的化学药液，安全、精准、零污染地输送到晶圆表面。华芯半导体化学风囊泵，正是为此而设计的“纯净心脏” ，以其卓越的材质与可靠的设计，深度融入各类湿法设备，成为保障工艺成功不可或缺的核心部件。
现代晶圆厂的中央药液供给系统（CDS），如同整个湿法区域的“动脉”，负责向多台设备持续输送不同种类的化学品。
应用场景： 作为CDS系统的核心输送单元。
价值体现：
超纯氟材料，杜绝二次污染： 泵体与药液接触部分全部由超纯氟材料制成，其极低的金属离子与颗粒析出特性，确保了从源头到终端的药液始终保持至高纯净度，完美满足高端芯片制造对杂质控制的严苛要求。
全面耐腐蚀，无所畏惧： 无论是酸性、碱性还是溶剂类药液，氟材料天生的强大耐化学腐蚀特性，都能轻松应对，显著提升系统的可靠性与使用寿命，降低维护成本。
单晶片处理设备追求极高的工艺均匀性与重复性，对药液输送的瞬间稳定性和洁净度提出了极限挑战。
应用场景： 集成于单晶片清洗机、蚀刻机内部，负责向喷淋臂或处理腔室精确供给药液。
价值体现：
无污染传输，保障器件性能： 在薄膜沉积前的清洗中，任何微量的金属污染都可能导致器件失效。华芯风囊泵的超纯特性，确保了清洗液在输送过程中不被引入新的杂质，为后续的高质量薄膜沉积打下坚实基础。
稳定供给，提升均匀性： 平稳的输送能力保证了药液能以均匀的流量和压力覆盖晶圆表面，从而获得一致性的清洗或蚀刻效果，直接提升整片晶圆的良率。
在用于光阻剥离、蚀刻后清洁等环节的槽式设备中，泵需要长时间、连续不断地工作，对耐久性和一致性要求极高。
应用场景： 应用于传统槽式湿法设备，进行循环、过滤和药液交换。
价值体现：
坚固耐用，保障连续生产： 采用铝合金壳体并辅以多层氧材料涂覆，在增强结构强度以承受长期运行的同时，有效抵抗设备内部化学气氛的侵蚀，确保生产节拍不受干扰。
高一致性，保证批间稳定性： 在百级、万级无尘车间生产的华芯风囊泵，具备极高的产品一致性。这意味着无论是在同一台设备上，还是 across 整个工厂的多台设备，都能提供完全相同的性能表现，确保每一批晶圆的工艺结果都稳定可靠。
In the microscopic realm of semiconductor wet processing, every cleaning cycle, every etching step, and every photoresist stripping operation constitutes a critical battle determining chip performance and yield rates. At the heart of these processes lies the secure, precise, and contamination-free delivery of high-purity chemical solutions to the wafer surface. Huaxin Semiconductor's chemical diaphragm pumps serve as the ‘pure heart’ engineered for this purpose. With their exceptional materials and reliable design, they are deeply integrated into various wet processing equipment, becoming indispensable core components that safeguard process success.
I. Within Chemical Delivery Systems (CDS): Guardian of High-Purity Chemicals
The central chemical delivery system (CDS) in modern fabs functions as the ‘artery’ of the entire wet processing area, continuously supplying diverse chemicals to multiple devices.
Application Scenario: Serves as the core delivery unit within CDS systems.
Value Proposition:
Ultra-pure fluoropolymer materials eliminate secondary contamination: All pump components in contact with chemicals are crafted from ultra-pure fluoropolymer materials. Their exceptionally low metal ion and particle leaching characteristics ensure chemicals maintain supreme purity from source to endpoint, perfectly meeting the stringent impurity control demands of high-end chip manufacturing.
Comprehensive corrosion resistance, fearless operation: Whether handling acidic, alkaline, or solvent-based solutions, fluoropolymer materials' inherent robust chemical corrosion resistance effortlessly accommodates all, significantly enhancing system reliability and service life while reducing maintenance costs.
II. Within Single-Wafer Cleaning/Etching Equipment: The Steady Arm for Precision Processes
Single-wafer processing equipment demands exceptional process uniformity and repeatability, posing extreme challenges to the instantaneous stability and cleanliness of chemical delivery.
Application Scenario: Integrated within single-wafer cleaners and etchers, it precisely supplies chemicals to spray arms or processing chambers.
Value Proposition:
Contamination-free transfer safeguards device performance: During pre-deposition cleaning, even trace metal contamination may cause device failure. Huaxin diaphragm pumps' ultra-pure characteristics ensure no new impurities are introduced during solution transfer, laying a solid foundation for subsequent high-quality film deposition.
Stable supply, enhanced uniformity: Steady delivery capacity ensures chemicals cover the wafer surface with consistent flow and pressure, achieving uniform cleaning or etching results that directly improve overall wafer yield.
III. Within Batch Wet Processing Equipment: The Reliable Engine Driving Efficient Production
In tank-based equipment used for processes such as photoresist stripping and post-etch cleaning, pumps must operate continuously for extended periods, demanding exceptional durability and consistency.
Application Scenario: Employed in conventional batch wet processing equipment for circulation, filtration, and chemical exchange.
Value Proposition:
Robust Durability for Uninterrupted Production: Featuring an aluminium alloy housing with multi-layer oxygen-resistant coating, it enhances structural integrity for sustained operation while effectively resisting corrosion from internal chemical atmospheres, ensuring uninterrupted production cycles.
High Consistency, Ensuring Batch-to-Batch Stability: Manufactured in Class 100 and Class 10,000 cleanrooms, Huaxin diaphragm pumps exhibit exceptional product consistency. This guarantees identical performance across multiple units within a single facility or throughout an entire plant, ensuring stable and reliable process outcomes for every batch of wafers.
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